: D. Fukuda, K. Watanabe, Y. Kanazawa, and M. Hashimoto, Modeling the Effect of Global Layout Pattern on Wire Width Variation for On-The-Fly Etching Process Modification, July 2015.
Detail of a work
| Tweet | |
| D. Fukuda, K. Watanabe, Y. Kanazawa, and M. Hashimoto, "Modeling the Effect of Global Layout Pattern on Wire Width Variation for On-The-Fly Etching Process Modification," IEICE Trans. on Fundamentals of Electronics, Communications and Computer Sciences, E98-A(7), pp. 1467--1474, July 2015. | |
| ID | 409 |
| 分類 | 論文誌 |
| タグ | |
| 表題 (title) |
Modeling the Effect of Global Layout Pattern on Wire Width Variation for On-The-Fly Etching Process Modification |
| 表題 (英文) |
|
| 著者名 (author) |
D. Fukuda,K. Watanabe,Y. Kanazawa,M. Hashimoto |
| 英文著者名 (author) |
|
| キー (key) |
|
| 定期刊行物名 (journal) |
IEICE Trans. on Fundamentals of Electronics, Communications and Computer Sciences |
| 定期刊行物名 (英文) |
|
| 巻数 (volume) |
E98-A |
| 号数 (number) |
7 |
| ページ範囲 (pages) |
1467--1474 |
| 刊行月 (month) |
7 |
| 出版年 (year) |
2015 |
| Impact Factor (JCR) |
|
| URL |
|
| 付加情報 (note) |
|
| 注釈 (annote) |
|
| 内容梗概 (abstract) |
|
| 論文電子ファイル | 221.pdf (application/pdf) [一般閲覧可] |
| BiBTeXエントリ |
@article{id409,
title = {Modeling the Effect of Global Layout Pattern on Wire Width Variation for On-the-Fly Etching Process Modification},
author = {D. Fukuda and K. Watanabe and Y. Kanazawa and M. Hashimoto},
journal = {IEICE Trans. on Fundamentals of Electronics, Communications and Computer Sciences},
volume = {E98-A},
number = {7},
pages = {1467--1474},
month = {7},
year = {2015},
}
|